© Copyright 2003 by Scientific Motion
Scientific Motion Flux Dispensers, Wafer Cleaners, Robotic Wafer Handling Systems, and Indexers are seamlessly integrated with all types of reflow ovens.
Processes wafer sizes from 100mm through 300mm.
Modular design allows up to 2 FOUP load ports or 2 cassette stations or combination of both.
Wafer size, lot size, and status are communicated between process equipment on both sides of the reflow oven via Ethernet.
SMEMA communication between process equipment and reflow oven ensures reliable process flow.
A 25 wafer buffer on the receive end of the reflow oven is utilized for reliable wafer handoff.
Emergency Machine Off (EMO) can be integrated between the reflow oven and process equipment for added safety.
Spin Coater Integrated With Oven
Indexer Integrated With Oven